Alicat M Series Mass Flow Meter User Manual

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The Fastest Flow Controller Company in the World!
Operating Manual
Precision Gas Mass Flow Meters
M-Series
MS-SeriesMB-Series
WHISPER
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Summary of Contents

Page 1 - Operating Manual

The Fastest Flow Controller Company in the World!Operating ManualPrecision Gas Mass Flow MetersM-SeriesMS-SeriesMB-SeriesWHISPER

Page 2 - ACCESSORIES



Page 3

OUTPUT SIGNALS

Page 4

CAUTION

Page 5

 

Page 6 - PLUMBING

 Main

Page 7 - PRESSURE

MAIN  

Page 8 - POWER AND SIGNAL CONNECTIONS



Page 9 - INPUT SIGNALS

RS232 COMMMFGDATAMAINMISCGASSELECTSELECT MENU

Page 10 - 

GAS SELECTGas SelectGAS SELECT

Page 11

COMMUNICATION SELECT RS232 COMM COMM Select MenuUnit ID

Page 12

06/16/2014 Rev.33 DOC-ALIMAN16RECALIBRATIONYour Alicat instrument is a precision device and Alicat strongly recommends that you send

Page 13

MISCELLANEOUS MiscellaneousMISCMISC1MISC2. MISC1

Page 14 - DISPLAYS AND MENUS

MISC2STP

Page 15

BACK MAINSCROLLR8: AP Sig 7871R9: Temp Sig 39071R10: DP Side 9986R11: DP Brdg 36673R13: AP Brdg 36673R16: Meter Fun 199R1

Page 16

 

Page 17 - SELECT MENU



Page 18 - GAS SELECT

Gas Select              

Page 19 - COMMUNICATION SELECT

                  

Page 20 - MISCELLANEOUS

   

Page 21

  

Page 22 - MANUFACTURER DATA



Page 23

3Thank you for purchasing an Alicat Gas Flow Meter. 

Page 24

GasNumberShort FormLong FormViscosity*25 deg C 14.696 psiaDensity**25 deg C 14.696 psiaCompressibility 25 deg C 14.696 psia0 Air Air 184.918 1.1840

Page 25

GasNumberShort FormLong FormViscosity*0 deg C 14.696 psiaDensity**0 deg C 14.696 psiaCompressibility 0 deg C 14.696 psia0 Air Air 172.588 1.2927 0.9

Page 26

TROUBLESHOOTING

Page 27

33

Page 28



Page 29



Page 30 - (NIST REFPROP 7 database)

Alicat Portable Meters and Gauges    

Page 31



Page 32

38

Page 33

39 

Page 34

TABLE OF CONTENTS Page    8 9

Page 35 - 00000.00

AccessoriesPart Number   

Page 36 - TOP VIEW OF DEVICE

     

Page 37

Technical Data for Alicat M Mass Flow Meters0 to 0.5 sccm Full Scale through 0 to 4000 slpm Full ScaleStandard Operating Specications (Contact Alic

Page 38 - BB-9 Multi-Drop

  

Page 39 - 

   

Page 40 - Accessories

  

Page 41

    M-Series:0 – 3000 s

Page 42 - Range Specic Specications

Technical Data for WHISPER Low Pressure Drop Mass Flow Meters0 to 0.5 sccm Full Scale through 0 to 500 slpm Full ScaleStandard Operating Specicatio

Page 43 - 

WHISPER MW:0 – 0.5 sccm0 – 1 sccm0 – 2 sccm0 – 5 sccm0 – 10 sccm0 – 20 sccmWHISPER MW:0 – 50 sccm 0 – 100 sccm0 – 200 sccm0 – 500 sccm0 – 1 slpm0 –

Page 44 - 

   WHISPER MW:0 – 20 slpmMW 20 s

Page 45 - 

TABLE OF CONTENTS Page   

Page 46

    

Page 47

Technical Data for Alicat MS-Series Mass Flow Meters

Page 48 -  

MS-Series:0 – 0.5 sccm0 – 1 sccm0 – 2 sccm0 – 5 sccm0 – 10 sccm0 – 20 sccm0 – 50 sccmMS-Series:0 – 100 sccm0 – 200 sccm0 – 500 sccm0 – 1 slpm0 – 2 s

Page 49 - 

   MS-Series:0 – 50 slpm0 – 100 slpmMS-Series:0 –

Page 50 - 

MS-Series:0 – 2000 slpmMS-Series:0 – 500 slpm0 – 1000 slpm0 – 1500 slpm500 slpm to 1500 slpm approximate shipping weight: 3.5 lb2000 slpm approximat

Page 51

  

Page 52 - 

SpecicationMeter or GaugeSmall ValveControllerLarge ValveControllerDescriptionInput /Output Signal Digital PROFIBUS DPElectrical Connections DB9Su

Page 53 - 

Eight Pin Mini-DIN Connector Pin-OutsIf your Alicat Instrument was ordered with the standard Eight Pin Mini-DIN connection, please be sure to refere

Page 54

  520-290-6060 Ph. 520-290-0109 Fax

Page 55 - 

Pin  3 

Page 56 - MC-1SLPM-PROFIBUS

GETTING STARTED8 Pin Mini-DINDisplay ScreenPower JackMOUNTING

Page 57



Page 58 - Rev. No. Description Date



Page 59 - Standard DB9 Pin-out



Page 60 - DB9A Pin-out



Page 61 - DB9N Pin-out



Page 62 - DB9R Pin-out

DB15 – Pin-Out Alicat StylePin Number Function1 Ground2 Primary Analog Signal Output3 Ground4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8 Analog Tare (meter

Page 63 - DB9T Pin-out

Pin Number Function1 Ground2 Primary Analog Signal Output3Analog Tare (meters — when grounded)*Analog Set-Point Input (controllers)*4 Ground5 Power

Page 64 - DB9U Pin-out

DB15B – Pin-Out “Brooks” StylePin Number Function1 Ground2 Primary Analog Signal Output3 N/C4 N/C5 Power Supply (+Vdc)6 N/C7 N/C8Analog Tare (meters

Page 65 - DB15 Pin-Outs

DB15K – Pin-Out “MKS” StyleThe following pin-out chart describes the safest and generally compatible arrangement when connecting a non-Alicat DB15 w

Page 66

DB15H – Pin-Out “Hastings H” StylePin Number Function1 N/C2 RS-232 RX (receive) or RS-485 – *3 N/C4 N/C5 Ground6 Primary Analog Signal Output7 Power

Page 67



Page 68 - DB15K – Pin-Out “MKS” Style

DB15S – Pin-Out “Sierra” StylePin Number Function1 Ground2 Primary Analog Signal Output 3 N/C4 N/C5 Ground6 N/C7 N/C8Analog Tare (meters — when grou

Page 69

Additional Information for Alicat CSA and ATEX Approved DevicesSee the following page for Special Conditions regarding the use of these units!EEx nA

Page 70

USE of Alicat instruments (M, MW, MS, MC, MCW, MCS, MCR, MCRW, MCRS, P, PS, PC, PCS, PCR and PCRS product families only) in Class 1 Division 2 appl

Page 71 - Class I, Zone 2 AEx nA IIC T4

Serial Number: ______________________Model Number: _________________________Notice: Alicat Scientic, Inc. reserves the right to make any changes and

Page 72 - Tel: 520-290-6060

alicat.com The Fastest Flow Controller Company in the World! #GasAbsoluteViscosity*25°C Density **25°C14.696PSIAC

Page 73 - Limited Lifetime Warranty

8POWER AND SIGNAL CONNECTIONS

Page 74 - Compressibility

9INPUT SIGNALSAnalog Input Signal

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